MegaSonic Cleaning Technology
Contact-Type Megasonic Transducer
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Zero surface damage: Owing to its gentle cleaning mechanism, no mechanical damage is inflicted on the surface of the cleaned objects. The system is constructed entirely from non-metallic, highly corrosion-resistant materials, making it compatible with a wide range of acids, alkalis, and organic solvents.
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Chemically assisted cleaning: Mega sonic cleaning can significantly reduce the consumption of chemical cleaning agents. For example, in SC-1 solutions (ammonia + hydrogen peroxide), it enhances electrostatic repulsion between particles and the surface, thereby improving cleaning efficiency and supporting environmentally friendly and sustainable manufacturing practices.
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High energy transfer efficiency: Contact-type megasonic cleaning systems deliver megasonic acoustic energy uniformly over a relatively large area directly to the substrate surface, achieving exceptionally high transmission efficiency and excellent acoustic field uniformity. This not only improves cleaning performance but also substantially reduces cleaning solution consumption. Through acoustic streaming effects, the liquid forms high-speed, directional flow that directly flushes away contaminants, enabling effective removal of particles smaller than 0.1 μm.