MegaSonic Cleaning Technology
Nozzle-Type Megasonic Transducer
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Strong focusing capability: Megasonic energy can be directly focused onto the substrate surface, enabling more precise cleaning of targeted areas. This provides a clear advantage in applications requiring localized or selective cleaning.
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High flexibility: By moving both the workpiece and the nozzle, a uniform acoustic field can be more easily achieved across the surface. The nozzle position and angle can be flexibly adjusted according to the shape of the component and specific cleaning requirements, making it adaptable to a wide range of cleaning tasks.
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High single-point cleaning precision: Single-point spray-type mega sonic cleaning effectively eliminates the risk of secondary contamination from the cleaning solution. With extremely low ultrasonic cavitation effects, it does not damage device surfaces and is capable of removing contaminant particles as small as 0.1 micrometers from the surface.