Nano Coating Technology

APPLICATION REQUIREMENT ：

• Improves resistance of metal and ceramic parts to special-gas corrosion and plasma erosion.

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CHALLENGES :

• Conventional coatings contain excessive pores and provide insufficient corrosion resistance

• Reactive films have limited durability and are difficult to regenerate

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TECHNICAL INNOVATION :

• Composite multilayer process increases density and reduces defects

• Multiple nano-coating options suit ceramic, metal and other substrates

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PERFORMANCE :

• Thickness: 1–20 μm; hardness: 2,000–3,200 HV

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APPLICATIONS :

• Semiconductor equipment stages, electrodes and related components

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