Nano Coating Technology

APPLICATION REQUIREMENT ：

• Improves local insulation performance on electrode carriers and similar components.

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CHALLENGES :

• Organic materials insulate extremely well but lack heat and wear resistance

• Ceramics provide insulation, heat and wear resistance, but dense nano-coating deposition is difficult and pores are common

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TECHNICAL INNOVATION :

• Proprietary process produces a highly dense nano-coating

• The material combines electrical insulation with high-temperature and wear resistance

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PERFORMANCE :

• Thickness: 2–4 μm; hardness: 800–1,200 HV

• Temperature resistance: 700°C; electrical resistance: 10¹³ Ω

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APPLICATIONS :

• Electrode carriers for semiconductor ion-implantation equipment

• Photoelectric, electroacoustic, electromagnetic and thermoelectric conversion devices

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