Nano Coating Technology

APPLICATION REQUIREMENT ：

• Increases component hardness and wear resistance while eliminating metallic-element contamination.

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CHALLENGES :

• Insufficient hardness and wear resistance

• High coating temperatures may distort component dimensions

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TECHNICAL INNOVATION :

• Hydrogen-free ultra-hard carbon film raises coating hardness and wear performance

• Optimised process uses a lower deposition temperature to preserve precision dimensions

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PERFORMANCE :

• Thickness: 2–4 μm; hardness: 3,000–4,000 HV

• Temperature resistance: 600°C, with corrosion resistance

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APPLICATIONS :

• Moving and friction components in semiconductor CMP, ECMP and other process equipment

• Wear parts in semiconductor packaging and metrology equipment

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