Nano Coating Technology

APPLICATION REQUIREMENT ：

• Protects moving and gas-path components from corrosive liquids and gases such as HCl, HBr and HF while also providing wear resistance.

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CHALLENGES :

• Resists HCl, HBr and HF simultaneously

• Resolves the trade-off between acid corrosion resistance and wear resistance

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TECHNICAL INNOVATION :

• Multiple composite materials and multilayer stacking improve corrosion performance

• Extremely dense structure reduces void defects; high hardness improves wear life several-fold

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PERFORMANCE :

• Thickness: 4–6 μm; hardness: 3,500–4,000 HV

• Temperature resistance: 400°C; extremely strong corrosion resistance

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APPLICATIONS :

• Vacuum-pump rotors, screws, sealing plates and chambers for semiconductor PVD, PECVD and etching equipment

• Gas-line components in semiconductor process equipment

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